PHD

- Short-Wavelength Light Sources for EUV MetrologyAngana Mondal - Materials department - Contact DynamicsBart Weber - Materials &amp; Surface Science for EUVLRoland Bliem - Materials Theory and ModelingEmilia Olsson PhD: Physics-Informed Machine Learning for Semiconductor Metrology Work Activities <br>How can we combine machine learning and physics to recover nanoscale information from imperfect...